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A2-Mode Lamb Passive-Wireless Surface-Acoustic-Wave Micro-Pressure Sensor Based on Cantilever Beam Structure

Zhuoyue Duan1, Tao Wang1, Wei Ji1

  • 1School of Information Science and Engineering, Shandong University, Qingdao 266237, China.

Sensors (Basel, Switzerland)
|April 28, 2025
PubMed

Keywords:
MEMS-compatible manufacturing processSAW micro-pressure sensorcantilever beampassive wireless

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