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Control of electrical properties in solution-processed ATO thin-film transistors through gallium doping
Bu Kyeong Hwang1, Ji Hyang An1, Bo Ram Lee1
1Nano Convergence Materials Center, Korea Institute of Ceramic Engineering and Technology (KICET) Jinju 52851 Republic of Korea soowon.heo@kicet.re.kr.
RSC Advances
|April 29, 2025
Summary
Gallium doping transforms highly conductive Antimony-Tin Oxide (ATO) into a switching semiconductor. Antimony-Gallium-Tin Oxide (AGTO) thin-film transistors show enhanced mobility and stability, enabling low-cost applications.
Area of Science:
- Materials Science
- Semiconductor Physics
- Device Engineering
Background:
- Solution-processed Antimony-Tin Oxide (ATO) films typically exhibit high conductivity, hindering their use in thin-film transistors (TFTs).
- Achieving controlled electrical properties in oxide semiconductors is crucial for advanced electronic applications.
Purpose of the Study:
- To investigate the impact of Gallium (Ga) doping on the electrical characteristics of solution-processed ATO.
- To develop a stable and functional oxide semiconductor material for TFTs.
Main Methods:
- Gallium (Ga) was doped into Antimony-Tin Oxide (ATO) at varying concentrations.
- Electrical properties of the resulting Antimony-Gallium-Tin Oxide (AGTO) thin-film transistors (TFTs) were characterized.
- Device performance was evaluated under bias stress conditions.
Main Results:
- Gallium doping successfully induced switching behavior in ATO films, creating Antimony-Gallium-Tin Oxide (AGTO) TFTs.
- A 20% Ga-doped AGTO TFT achieved a saturation mobility of 1.12 cm2 V-1 s-1 and an on/off current ratio of 4.68 × 104.
- The AGTO TFT demonstrated good stability under bias stress, with minor threshold voltage shifts.
Conclusions:
- Gallium doping effectively reduces carrier concentration and oxygen-related defects in ATO films.
- Ga doping suppresses crystallization, leading to highly uniform AGTO films.
- Solution-processed AGTO is a promising oxide semiconductor for cost-effective, large-area electronic applications.
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