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Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes

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Inorganic Dielectric Materials Coupling Micro-/Nanoarchitectures for State-of-the-Art Biomechanical-to-Electrical

Jia-Han Zhang¹, Zhengtong Li², Zeng Liu¹

¹School of Electronic Information Engineering, Electronic-Photonic Smart Sensing Device R&D Team, Inner Mongolia Key Laboratory of Intelligent Communication and Sensing and Signal Processing, Inner Mongolia University, Hohhot, 010021, China.

Advanced Materials (Deerfield Beach, Fla.)

|May 3, 2025

Summary

This review unifies the understanding of inorganic dielectric materials and micro-/nanoarchitectures in nanogenerators (NGs) for biomechanical energy harvesting. It highlights their role in enhancing power generation and sensing capabilities for future personalized devices.

Keywords:

biomechanical‐to‐electrical energy conversion inorganic dielectric materials micro‐/nanoarchitectures

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Area of Science:

Materials Science
Energy Harvesting
Biomedical Engineering

Background:

Nanogenerators (NGs) emerged in 2006 for biomechanical-to-electrical energy conversion, crucial for IoT and self-powered systems.
Integration of inorganic dielectric materials (IDMs) and micro-/nanoarchitectures significantly boosts NG performance for energy harvesting and physiological sensing.

Purpose of the Study:

To systematically review the mechanisms and design effects of IDMs coupled with micro-/nanoarchitectures across various NGs.
To provide a unified perspective on how these integrated materials enhance biomechanical energy conversion.
To explore advanced applications and future design guidelines for personalized power supplies and sensor networks.

Main Methods:

Systematic review of existing literature on nanogenerators, focusing on IDMs and micro-/nanoarchitectures.
Analysis of theoretical underpinnings of NG performance enhancement.
Discussion of applications in human energy scavenging and physiological signal sensing.

Main Results:

IDMs and micro-/nanoarchitectures significantly enhance electrical performance in triboelectric, piezoelectric, and flexoelectric NGs.
This integration enables near-theoretical energy harvesting and precise detection of multiple physiological signals.
A unified perspective on the role of these integrated materials across different NG types is established.

Conclusions:

The synergistic effect of IDMs and micro-/nanoarchitectures is key to advancing biomechanical energy harvesting NGs.
Future research should focus on rational design guidelines for high-performance personalized power supplies and sensor networks.
This review offers insights for developing next-generation energy harvesting and sensing technologies.