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A Silicon Microring Resonator for Refractive Index Carbon Dioxide Gas Sensing
Jiaqi Wang1, Hui Zhang1, Si Chen2,3
1College of Physics and Optoelectronic Engineering, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University, Shenzhen 518060, China.
ACS Sensors
|May 6, 2025
Summary
This study presents a silicon microring resonator (MRR) for carbon dioxide sensing. It achieves temperature compensation by utilizing distinct mode sensitivities, enabling accurate gas detection.
Area of Science:
- Photonics
- Chemical Sensing
- Materials Science
Background:
- Silicon microring resonators (MRRs) offer advantages for on-chip optical sensing.
- Refractive index sensors face challenges with temperature cross-sensitivity due to the thermo-optic effect.
- Accurate gas sensing requires mitigation of temperature-induced signal variations.
Purpose of the Study:
- To develop a silicon MRR for carbon dioxide (CO2) sensing with integrated temperature compensation.
- To engineer an MRR with distinct sensitivities to gas concentration and temperature.
- To demonstrate the feasibility of on-chip optical gas sensing with improved accuracy.
Main Methods:
- Fabrication of a silicon MRR functionalized with polyhexamethylene biguanide hydrochloride as the sensing layer.
- Utilizing TE0 and TE1 modes to achieve independent responses to gas and temperature.
- Characterization of gas sensitivity and temperature cross-sensitivity.
Main Results:
- Demonstrated distinct temperature and gas sensitivities for TE0 and TE1 modes.
- Achieved a gas sensitivity of -0.90 pm/ppm for CO2 within a 700 ppm range.
- Reported response and recovery times of approximately 3.5 and 1.5 minutes, respectively.
- Successfully compensated for temperature variations.
Conclusions:
- The engineered silicon MRR effectively senses CO2 with temperature compensation.
- The differential mode sensitivity approach enables accurate optical gas sensing.
- This work advances the development of robust on-chip gas sensing platforms.
