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Updated: May 12, 2025
10:26
Fabrication and Characterization of Superconducting Resonators
Published on: May 21, 2016
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Superconducting micro-resonator arrays with ideal frequency spacing
1Quantum Optoelectronics Laboratory, School of Physical Science and Technology, Southwest Jiaotong University, Chengdu 610031, China.
Applied Physics Letters
|May 7, 2025
Summary
A novel wafer trimming technique enhances superconducting micro-resonator array uniformity. This method improves frequency spacing and array yield for photon detection and quantum computing applications.
Area of Science:
- Superconducting devices
- Microfabrication
- Quantum technology
Background:
- Superconducting micro-resonator arrays are crucial for quantum computing and photon detection.
- Achieving uniform frequency spacing in large arrays is challenging, limiting yield and multiplexing density.
Purpose of the Study:
- To present a wafer trimming technique for improving frequency spacing uniformity in superconducting micro-resonator arrays.
- To demonstrate the effectiveness of the technique in enhancing array yield without compromising performance.
Main Methods:
- Utilized a light-emitting diode mapper to identify resonance frequencies of individual resonators.
- Employed lithographic trimming of interdigitated capacitors to adjust resonator frequencies.
- Applied the technique to a 127-resonator array fabricated from titanium nitride.
Main Results:
- Significantly improved the uniformity of frequency spacing across the resonator array.
- Increased array yield, reducing frequency collisions from 84% to 97%.
- Maintained high quality factors and unaffected noise properties of the resonators.
Conclusions:
- The wafer trimming technique offers a practical solution for fabricating highly uniform superconducting micro-resonator arrays.
- This method enhances array yield and multiplexing capabilities, benefiting quantum computing and photon detection.
- The technique is easily implementable and preserves essential resonator characteristics.
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