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Updated: May 12, 2025

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Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes
Published on: January 19, 2020
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Focused ion and electron beams for synthesis and characterization of nanomaterials
1Academic Centre for Materials and Nanotechnology, AGH University of Krakow, av. Mickiewicza 30, 30-059, Krakow, Poland.
Beilstein Journal of Nanotechnology
|May 7, 2025
Abstract
No abstract available in PubMed .
Keywords:
3D nanostructuresdepositionetchingfocused electron beamsfocused ion beamslithographymillingnanofabricationMore Related Videos
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