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Updated: May 23, 2025

Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
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Anisotropic Vanadium Dioxide Nanogratings by Direct Laser-Induced Periodic Surface Structuring (LIPSS).

Dmitry V Pavlov1, Haoxin Zhou2, Aleksei G Kozlov3

  • 1Institute of Automation and Control Processes, Far Eastern Branch, Russian Academy of Science, Vladivostok 690041, Russia.

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Summary

Femtosecond laser nanopatterning precisely creates subwavelength nanogratings on thermochromic vanadium dioxide (VO2) films. This plasmon-assisted method enhances optical properties for advanced optical filters and sensors.

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Last Updated: May 23, 2025

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Optoelectronics

Background:

  • Thermochromic vanadium dioxide (VO2) films are crucial for optical filters and sensors.
  • Micro- and nanoscale patterning of VO2 is essential for next-generation devices.
  • Scalable and high-performance nanofabrication technologies for VO2 are needed.

Purpose of the Study:

  • To report precise and nondestructive femtosecond laser nanopatterning of VO2 films.
  • To investigate direct ablation and plasmon-assisted self-organization regimes.
  • To explore the formation of subwavelength nanogratings on VO2.

Main Methods:

  • Femtosecond laser irradiation under ambient conditions.
  • Utilizing multipulse irradiation to induce optical excitation and surface plasmon interference.
  • Employing direct ablation and plasmon-assisted self-organization techniques.

Main Results:

  • Achieved spatially uniform subwavelength nanogratings with ~100 nm periodicity.
  • Demonstrated plasmon-assisted nanotexturing preserves VO2 film composition.
  • Observed modulated optical properties: enhanced visible transmittance and near-IR thermochromic anisotropy.

Conclusions:

  • Shed light on the origin of laser-driven self-organization in VO2 films.
  • Unveiled potential of scalable, nondestructive fs-laser patterning for optoelectronic devices.
  • Highlighted the utility of optically anisotropic nanotextured VO2 films for novel sensing applications.