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Updated: May 16, 2025

The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry
Published on: August 12, 2013
Lihua Lei1,2, Changjian Sun3, Zhangning Xie1,2
1Shanghai Institute of Measurement and Testing Technology, Shanghai, 201203, China.
A new multi-beam laser interferometer system simultaneously measures six-degree-of-freedom errors in CNC machine tools. This spatial error compensation significantly enhances machine tool accuracy and positioning precision.
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