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High-Performance Atomic-Layer-Deposited Dual-Gate InGaO Thin-Film Transistors

Chenchen Ye1, Jiakang Li1, Peiyan Hong1

  • 1Wuhan National High Magnetic Field Center, School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan 430074, China.

Nano Letters
|May 15, 2025
PubMed

Keywords:
O3 treatmentdual-gate TFTsindium−gallium oxidemobility

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