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Bioinspired flow-sensing capacitive microphone.

Johar Pourghader¹, Weili Cui², Mahdi Farahikia³

¹Department of Mechanical Engineering, Binghamton University, Binghamton, New York 13902, USA.

The Journal of the Acoustical Society of America

|May 23, 2025

Summary

This summary is machine-generated.

This study introduces a novel MEMS microphone inspired by animal hearing. It senses acoustic particle velocity using viscous forces, offering high sensitivity and low noise for advanced acoustic applications.

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Area of Science:

Acoustic Engineering
MEMS Technology
Bio-inspired Design

Background:

Conventional microphones detect sound pressure, a scalar quantity.
Existing designs lack the ability to sense acoustic particle velocity, a vector quantity.
Biological auditory systems in animals like insects offer insights into flow sensing.

Purpose of the Study:

To introduce a novel, low-noise, capacitive Micro-Electro-Mechanical Systems (MEMS) microphone.
To design a microphone capable of sensing acoustic particle velocity.
To emulate the flow-sensing mechanisms found in the auditory systems of small animals.

Main Methods:

A MEMS microphone design utilizing a thin, porous, movable structure driven by viscous forces from sound-induced flow.
Fabrication using a single layer of silicon on insulator (SOI) wafer via photolithography.
A structure with dimensions of 0.7 mm × 1.2 mm, rotating around a central hinge to alter capacitance.

Main Results:

The microphone directly responds to acoustic particle flow (vector) rather than pressure (scalar).
Achieved a sensitivity of approximately 5 mV/Pa.
Demonstrated a low noise floor between 10^-4 and 10^-5 Pa/√Hz.
Exhibited directivity ratios up to 77 at 2000 Hz.

Conclusions:

The developed MEMS microphone effectively senses acoustic particle velocity.
The bio-inspired design offers superior performance characteristics, including high sensitivity and low noise.
This technology holds significant potential for high-performance acoustic sensing applications.