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Updated: Sep 20, 2025

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
VOx-Based Non-Volatile Radio-Frequency Switches for Reconfigurable Filter
Dabin Seo1, Dahyeon Kim2, Jiyeon Ryu1
1Graduate School of Semiconductor Materials and Devices Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan, 44919, South Korea.
Abstract:
Vanadium oxide (VOx) based memristor is a promising candidate for next-generation non-volatile memory and radio-frequency (RF) switches due to its compatibility with wafer-level integration and high-frequency operation. This work demonstrates high-performance VOx memristor with gold and silver electrodes, achieving a higher cutoff frequency compared to previously reported VOx devices. The devices exhibit long retention, high endurance (≈103 cycles), and nanosecond switching speeds, enabling the fabrication of RF switches with a cutoff frequency of ≈4.5 THz, low insertion loss (< 0.46 dB), and high isolation (>20 dB) from 0.1 to 20 GHz with stable operation extended to frequency up to 67 GHz. Leveraging these switches, a reconfigurable X-band bandpass filter whose is realized center frequency is tuned from 8.2 GHz in the OFF state to 7.6 GHz in the ON state, achieving a tunable range of ≈600 MHz. This demonstration paves the way for compact and versatile RF front-ends with improved frequency agility in advanced communication systems.
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