Highly Efficient Planar Hot Electron Emitters Based on Ultrathin Pyrolyzed Polymer Films.

Area of Science:

• Materials Science
• Nanotechnology
• Electronics

Background:

• Miniaturized hot electron emitters are crucial for chemical analytics and field systems.
• Existing technologies face limitations in efficiency and scalability.

Purpose of the Study:

• To develop highly efficient planar hot electron emitters (PHEEs) using ultrathin pyrolyzed polymer films (PPFs).
• To investigate the properties and performance of PPF-based PHEEs for advanced applications.

Main Methods:

• Fabrication of PHEEs utilizing ultrathin (approx. 1 nm) pyrolyzed polymer films (PPFs) as gate electrodes.
• Characterization of PPF conductivity and electron transparency.
• Evaluation of PHEE transfer ratios, stability, and uniformity.

Main Results:

• Achieved high PPF conductivity (3.5 × 10^4 S/m) at low pyrolysis temperatures (900 °C).
• Demonstrated PHEEs with high transfer ratios (up to 31%) and excellent stability.
• Exhibited high device uniformity (2.9% standard deviation) across a wafer.
• Confirmed operation in nitrogen and air for gas ionization and sensing applications.

Conclusions:

• Ultrathin PPFs enable the fabrication of highly efficient and stable PHEEs.
• The presented two-step fabrication process (photolithography and pyrolysis) is straightforward and scalable.
• PPF-based PHEEs offer a sustainable and versatile solution for chemical analytics and sensing.