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Updated: Jun 12, 2025

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Plasma-assisted Molecular Beam Epitaxy of N-polar InAlN-barrier High-electron-mobility Transistors
Published on: November 24, 2016
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Impact of Channel Effects on Radiation-Hardened InAlGaN HEMTs for Low-Earth-Orbit Applications
Shao-Kuan Lee1, You-Chen Weng2, Chien-Yuan Huang1
1International College of Semiconductor Technology, National Yang Ming Chiao Tung University, 30010 Hsinchu, Taiwan.
ACS Omega
|June 9, 2025
Summary
Optimizing InAlGaN High Electron Mobility Transistors (HEMTs) channel thickness to 100 nm enhances radiation hardness against 90 MeV proton irradiation. This is crucial for reliable performance in low-earth-orbit (LEO) applications.
Area of Science:
- Materials Science
- Semiconductor Physics
- Radiation Effects in Electronics
Background:
- High Electron Mobility Transistors (HEMTs) are vital for space applications.
- InAlGaN HEMTs are susceptible to radiation damage, impacting their performance.
- Low-Earth-Orbit (LEO) environments pose significant radiation challenges.
Purpose of the Study:
- To investigate the effect of channel thickness on the radiation hardness of InAlGaN HEMTs.
- To determine the optimal channel thickness for devices subjected to proton irradiation.
- To understand the degradation mechanisms in InAlGaN HEMTs under irradiation.
Main Methods:
- Fabrication of InAlGaN HEMTs with varying channel thicknesses (50, 100, 150 nm).
- Proton irradiation of devices using 90 MeV protons at fluences from 2 × 10^10 to 2 × 10^13 protons/cm^2.
- Characterization of device performance (DC, RF, mobility, sheet resistance) before and after irradiation.
Main Results:
- The 100 nm channel thickness demonstrated superior radiation hardness compared to 50 nm and 150 nm.
- Higher mobility and lower sheet resistance were maintained in the 100 nm devices.
- Ionizing energy loss was the primary degradation mechanism, with contributions from displacement damage.
Conclusions:
- Channel thickness is a critical parameter for enhancing the radiation tolerance of InAlGaN HEMTs.
- A 100 nm channel thickness offers optimal radiation hardness for LEO applications.
- Device design optimization is essential for reliable operation in harsh radiation environments.
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