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Updated: Jun 12, 2025

Bulk and Thin Film Synthesis of Compositionally Variant Entropy-stabilized Oxides
Published on: May 29, 2018
Single target formulation of thin film 58S bioactive glasses via magnetron sputtering with custom targets from
Yao-Chong Fan1, Henni Setia Ningsih1, Masatsugu Oishi2
1Department of Mechanical Engineering, National Taiwan University of Science and Technology No. 43, Sec. 4, Keelung Road Taipei 10607 Taiwan yu-jen.chou@mail.ntust.edu.tw +886-2-2737-6492.
Abstract:
Due to the bioactive properties that stimulate the growth of new bones, bioactive glasses (BGs) have been widely used in fields of medical science. Yet, the lack of mechanical properties limits the application of BGs. Therefore in this study, thin film 58S BGs were prepared via magnetron sputtering with customed targets from spray-dried powders. The preparation method of radio-frequency magnetron sputtering was used with the advantages of excellent uniformity, high adherence, and precise thickness control over other deposition methods. The crystallographic information, thin film morphology, and elemental composition of the as-deposited thin film BGs were characterized via X-ray diffraction, scanning electron microscopy, and energy dispersive spectroscopy, respectively. Furthermore, the in vitro bioactivity was examined using simulated body fluid according to Kokubo's protocol, whereas the in vitro cell viability was assessed following the 3-(4,5-dimethylthiazol-2-yl)-2,5-diphenyltetrazolium bromide assay. Finally, the results showed the successful preparation of thin film 58S BG specimens with bioactivity and non-toxicity, and their corresponding formation mechanisms and property correlations were discussed.

