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A segmented model based internal model control scheme of electromagnetic micro-mirror systems.

Ruili Dong1, Qingyuan Tan2, Yonghong Tan3

  • 1College of Information Science and Technology, Donghua University, Shanghai 201620, China.

ISA Transactions
|June 11, 2025
PubMed
Summary

A new segmented internal model control (SIMC) strategy effectively manages electromagnetic micro-mirror systems (EMMS) by using a combination of models. This approach addresses complex nonlinear dynamics, improving deflection angle control accuracy.

Keywords:
Electromagnetic micro-mirrorFrequency segmented combination modelHysteresisInternal model control

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Area of Science:

  • Control Systems Engineering
  • Nonlinear Dynamics
  • Micro-optics

Background:

  • Electromagnetic micro-mirror systems (EMMS) exhibit complex nonlinear dynamics, including underdamped oscillation and rate-dependent hysteresis.
  • Accurate control of the deflection angle in EMMS is crucial for various optical applications.
  • Existing control strategies may struggle with the inherent nonlinearities of EMMS.

Purpose of the Study:

  • To develop a novel segmented internal model control (SIMC) scheme for electromagnetic micro-mirror systems (EMMS).
  • To establish an inverse model for EMMS that accounts for underdamped oscillation and rate-dependent hysteresis.
  • To improve the accuracy and robustness of EMMS deflection angle control.

Main Methods:

  • A segmented combination model is proposed, comprising weighted sub-models based on operating frequency segmentation.
  • A smoothing factor function is introduced to minimize dynamic errors during sub-model switching.
  • Particle Swarm Optimization (PSO) is employed to determine optimal frequency segmentation points.
  • A two-degree-of-freedom filter design, based on the small gain theorem, is integrated into the SIMC scheme.

Main Results:

  • The proposed segmented combination model accurately describes EMMS characteristics, including nonlinearities.
  • The SIMC strategy with smoothing factors significantly reduces dynamic errors compared to traditional methods.
  • Optimal frequency segmentation points determined by PSO enhance model performance.
  • Experimental validation demonstrates the effectiveness of the proposed control strategy for EMMS deflection angle control.

Conclusions:

  • The developed segmented internal model control (SIMC) scheme provides an effective solution for controlling complex nonlinear systems like EMMS.
  • The proposed segmented combination model and smoothing factor approach enhance control accuracy and reduce switching-induced errors.
  • This method offers a promising advancement for precise control of electromagnetic micro-mirror systems.