Mapping of Lapping-Induced Subsurface Damage in Planar Fused Silica Glass Based on Polarized Laser Scattering Method

Fused silica glass is a critical material in many industries due to its superior physicochemical properties. The detection of subsurface damage (SSD) poses fundamental challenges that directly affect the performance of fused silica glass. The polarized laser scattering (PLS) detection method has significant advantages in SSD detection, but damage mapping has not yet been achieved. This paper proposes an SSD mapping method based on the PLS detection results. The relationship between the PLS detection signals and the SSD depths of fused silica glass is established, and an SSD mapping diagram is successfully generated. Unlike existing studies that only provide local quantitative SSD depth, SSD mapping achieves simultaneous visualization of SSD location, depth, and uniformity of SSD distribution across the entire region, which provides guidance to determine the lapping or polishing parameters in the subsequent processes.