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Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods
Published on: September 14, 2017
Porogen-Integrated Rapid Oxidation Enables Structured Mesoporous Metal Oxide Films
David W Collinson1, Thomas W Colburn1, Robert D Miller1
1Department of Materials Science and Engineering, Stanford University, Stanford, CA, 94305, USA.
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Structured metal oxide films have promise in optoelectronics, sensing, energy storage, and catalysis but their uptake is predominately limited due to their long and high-temperature syntheses. Here, a self-assembling polymer is used which can act as a chelating fuel source in a solution combustion reaction to generate highly structured mesoporous aluminum oxide films at <250 °C in a matter of minutes through a process termed porogen-integrated rapid oxidation (PiRO). The resulting films with thicknesses up to 500 nm show an open-cell, face-centered cubic structure of spheroidal pores. Further, an additional ligand can be included to control the self-assembly step to yield both through-film ordering or tunable disordering for increased pore volume as confirmed by both grazing incidence small angle X-ray scattering and ellipsometry. Finally, roll-to-roll manufacturing with PiRO is demonstrated on flexible polymeric substrates. The method offers a tunable, scalable, low-temperature, and lower-cost method to generate large-area structured mesoporous metal oxide films.

