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In situ online deflectometry with synchronized calibration and measurement
Optics Letters
|June 13, 2025
Summary
This study introduces a synchronized calibration and measurement method to eliminate systematic errors in deflectometry. The new approach achieves nanometric-level accuracy for in situ surface characterization and optical fabrication.
Area of Science:
- Optics and Optical Engineering
- Metrology and Measurement Science
Background:
- Accurate deflectometric measurements of specular surfaces require precise calibration.
- Traditional calibration methods are susceptible to systematic errors due to system instability during the calibration-measurement process.
Purpose of the Study:
- To develop a synchronized calibration and measurement method for deflectometry.
- To address and mitigate instability-induced systematic errors in high-accuracy surface measurements.
Main Methods:
- Implementation of a synchronized calibration and measurement technique for deflectometry.
- Experimental validation under simulated in situ conditions.
Main Results:
- Demonstrated nanometric-level agreement between interferometry and deflectometry.
- Successfully tackled systematic errors caused by system instability.
Conclusions:
- The proposed method enables nanometric-level in situ deflectometry.
- This advancement supports high-accuracy optical fabrication and online surface characterization.
