Double rectangular-grooves metasurface for highly efficient electric modulation

With the rapid development of optical communication, how to achieve efficient modulation (fast response speed and high modulation depth) of optical signals has attracted more and more attention from researchers. Among all electro-optical modulator (EOM) designs, the electro-optical metasurface is undoubtedly a competitive solution for optical signal modulation in free space. Although current research on electro-optical metasurfaces has realized improving response speed owing to the Pockels effect, there are still difficulties in achieving high modulation depth under CMOS-compatible voltage and developing rational designs of metasurfaces to achieve voltage application that trigger electro-optical effects. In this work, an ultrahigh-Q factor BaTiO₃ (BTO) electro-optical metasurface, which consists of a periodic array of rectangular grooves, was designed to provide a feasible solution to address these shortcomings. Based on bound states in the continuum (BIC) theory, ultrahigh-Q factor (2.87 × 10⁵) quasi-BIC (Q-BIC) was obtained around 1550 nm by breaking the in-plane symmetry of the two rectangular grooves in a unit cell, which could significantly deepen the modulation depth. The concave and continuous structure of rectangular grooves made the application of voltage more efficient. The simulation results show that an optical signal modulation in free space with a modulation depth of 100% could be achieved. Multipole decomposition indicated that toroidal dipole (TD) was dominant in this Q-BIC. Our work may further promote the development of electro-optical modulation towards faster and deeper modulation.