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Low-coherence interferometric dimensional measurement technique based on synchrosqueezed wavelet transform.

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    This study introduces a synchrosqueezed Wavelet Transform (SSWT) method for precise low-coherence interferometric measurements in dispersive media. SSWT significantly enhances measurement stability and accuracy, offering a reliable solution for industrial dimensional measurements.

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    Area of Science:

    • Optical Metrology
    • Signal Processing
    • Materials Science

    Background:

    • Low-coherence interferometry faces challenges with measurement stability in dispersive media like glass.
    • Dispersive media introduce phase variations in interference spectra, complicating accurate measurements.

    Purpose of the Study:

    • To develop a high-precision, low-coherence interferometric measurement method robust to dispersive media.
    • To enhance measurement stability and accuracy using advanced signal processing techniques.

    Main Methods:

    • Analysis of glass-based dispersive media using the Schott dispersion formula.
    • Application of Wavelet Transform for chirp extraction and optical path length separation.
    • Implementation of Synchrosqueezed Wavelet Transform (SSWT) for improved time-frequency resolution and signal energy concentration.

    Main Results:

    • SSWT demonstrated superior noise resistance and measurement precision compared to traditional Fourier Transform (FT) and Continuous Wavelet Transform (CWT).
    • Achieved significant improvements in peak full-width at half-maximum (3x for FT, 7x for CWT) and standard deviation (9.1x for FT, 17.1x for CWT).
    • Successfully captured chirp characteristics and reduced phase noise in interferometric measurements.

    Conclusions:

    • The SSWT-based white-light interferometric method offers a high-precision and reliable solution for dimensional measurements.
    • SSWT enhances instantaneous frequency capture accuracy, leading to more robust measurements in industrial applications.
    • This technique effectively overcomes limitations of traditional methods in handling dispersive media.