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  11. Modeling And Analysis Of Measurement Error For A Four-axis Optical Profilometer

Modeling and analysis of measurement error for a four-axis optical profilometer

Sicheng Jiao, Wei Wang, Zhipeng Yang

    Optics Express
    |June 14, 2025

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    View abstract on PubMed

    Summary
    This summary is machine-generated.

    This study presents a new method for modeling and analyzing geometric errors in multi-axis optical profilometers. The approach enhances measurement accuracy by introducing an effective working distance error index for improved error compensation.

    Area of Science:

    • Metrology
    • Optical Engineering
    • Mechanical Engineering

    Background:

    • Multi-axis optical profilometers are crucial for precision measurements in optics and aerospace.
    • Geometric errors significantly affect the accuracy of these instruments.
    • Existing error analysis methods may lack comprehensive sensitivity evaluation.

    Purpose of the Study:

    • To develop an advanced approach for error modeling and analysis of a four-axis optical profilometer.
    • To introduce a novel error sensitivity evaluation index that considers workpiece surface profiles.
    • To improve the efficiency and effectiveness of error compensation in optical profilometry.

    Main Methods:

    • Utilized Multi-Body System (MBS) theory and the Homogeneous Transformation Matrix (HTM) method.

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  • Established a measurement error model encompassing forty-five geometric errors.
  • Proposed a new index, effective working distance error (WDEe), for sensitivity evaluation.

    • Main Results:

    • Comparative experiments showed compensation using the proposed method yielded results closer to reference values (3.189 µm vs. 2.985 µm).
    • The new method outperformed conventional approaches (3.189 µm vs. 3.320 µm).
    • The WDEe index replaced six traditional volumetric error indexes, enhancing analysis.

    Conclusions:

    • The proposed error modeling and compensation approach effectively improves optical profilometer performance.
    • The novel WDEe index offers a more sensitive and comprehensive evaluation of measurement errors.
    • This method enhances error compensation efficiency and accuracy in precision metrology.