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Related Concept Videos

IR Spectrometers01:25

IR Spectrometers

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There are two main infrared (IR) spectrophotometers: dispersive IR spectrometers and Fourier transform infrared (FTIR) spectrometers. In a dispersive IR spectrometer, a beam of infrared radiation produced by a hot wire is divided into two parallel equal-intensity beams using mirrors. One beam passes through the sample, while another is a reference beam. The beams then move through the monochromator, which separates the radiations into a continuous spectrum of different frequencies. The...
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  11. Contactless Temperature Measurement Of An In-process Silicon Wafer Using A Spectrally Shaped Supercontinuum Source.
  1. Home
  3. Research Domains
  5. Engineering
  7. Nanotechnology
  9. Nanophotonics
  11. Contactless Temperature Measurement Of An In-process Silicon Wafer Using A Spectrally Shaped Supercontinuum Source.

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Contactless temperature measurement of an in-process silicon wafer using a spectrally shaped supercontinuum source.

Abhigyan Goswami, Sarthak Dash, Sushobhan Avasthi

    Optics Express
    |June 14, 2025

    View abstract on PubMed

    Summary
    This summary is machine-generated.

    This study introduces a tailored supercontinuum laser for accurate, high-speed non-contact wafer temperature measurement in silicon microfabrication. The novel approach achieves ~1°C accuracy across a wide temperature range, improving system efficiency.

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    Area of Science:

    • Materials Science
    • Optical Engineering
    • Semiconductor Manufacturing

    Background:

    • Non-contact temperature measurement is crucial for advanced silicon microfabrication.
    • Existing methods using multiple lasers are complex and slow.
    • Silicon's near-infrared absorption varies with temperature, enabling optical measurement.

    Purpose of the Study:

    • To develop a simplified and faster non-contact wafer temperature measurement system.
    • To improve accuracy, especially at lower temperatures, compared to flat supercontinuum sources.
    • To leverage a tailored telecom fiber-based supercontinuum source for enhanced performance.

    Main Methods:

    • Utilized a compact, cost-effective telecom fiber-based supercontinuum source.
    • Tailored the supercontinuum spectrum with an exponential roll-off towards longer wavelengths.
  • Optimized the spectral shape for improved temperature measurement accuracy.

    • Main Results:

    • Achieved ~1°C accuracy from room temperature to 600°C, a >6x improvement over flat supercontinuum sources.
    • Enhanced measurement accuracy in the lower temperature range.
    • Increased acquisition speed to ~66 ms by eliminating optical switches.

    Conclusions:

    • A tailored supercontinuum source significantly improves non-contact wafer temperature measurement accuracy and speed.
    • The proposed method offers a simplified, cost-effective solution for silicon microfabrication.
    • The system is scalable for multi-point temperature monitoring.