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Near-common-optical-path two-axis surface encoder with a three-layer gratings interference method.

Yifan Hong, Ryo Sato, Zhiyang Zhang

|June 14, 2025

Summary

This summary is machine-generated.

A novel three-layer gratings (TLGs) interference method enhances surface encoder accuracy for wide-range, two-axis displacement measurement. This design improves robustness against environmental disturbances, enabling precise in-plane and out-of-plane motion tracking.

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Area of Science:

Optical Engineering
Metrology
Nanotechnology

Background:

Conventional surface encoders face limitations in out-of-plane displacement measurement, particularly concerning environmental disturbances.
Michelson interference-based methods struggle with Z-axis accuracy in surface encoders.

Purpose of the Study:

To propose a near-common-optical-path two-axis surface encoder design.
To enhance the robustness and accuracy of displacement measurement, especially for out-of-plane (Z-axis) motion.

Main Methods:

Adoption of a novel three-layer gratings (TLGs) interference method.
Utilizing a near-common-optical-path design to minimize environmental impact.
Implementing a beam-splitting and diffraction strategy across multiple grating layers.

Main Results:

The TLGs interference method enables simultaneous in-plane and out-of-plane wide-range displacement measurement.
The near-common-optical-path design significantly improves robustness against environmental disturbances.
A prototype demonstrated the effectiveness of the proposed TLGs interference method for accurate two-axis displacement tracking.

Conclusions:

The proposed TLGs interference method offers a significant advancement in surface encoder technology.
This design provides a robust and accurate solution for wide-range, two-axis displacement measurement.
The method overcomes limitations of conventional encoders in out-of-plane measurements.