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Updated: Jun 16, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
A novel three-layer gratings (TLGs) interference method enhances surface encoder accuracy for wide-range, two-axis displacement measurement. This design improves robustness against environmental disturbances, enabling precise in-plane and out-of-plane motion tracking.
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