Abstract
To address the need for high-precision and highly flexible sub-aperture figuring and finishing techniques for optics fabrication, we investigate alternative non-contact figuring and finishing methods using femtosecond lasers to fabricate microprism arrays. For the first time, to our knowledge, we have predicted and created microprism arrays, demonstrating precision material removal while maintaining sub-nanometer surface roughness. The one-step femtosecond shaping and finishing technique establishes the foundation for ultrafast-laser-based freeform optics fabrication.