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    A new cross-period sub-Nyquist sampling method enhances low-coherence scanning interferometry (LCSI) efficiency. This technique achieves higher accuracy and improved roughness measurements with a significantly larger sampling interval than the Nyquist limit.

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    Area of Science:

    • Optical Metrology
    • Surface Profilometry
    • Interferometry

    Background:

    • Low-coherence scanning interferometry (LCSI) is a precise 3D surface profilometry technique.
    • The Nyquist sampling criterion limits LCSI measurement efficiency by dictating a small sampling interval.
    • Preserving signal characteristics requires adherence to strict sampling intervals, hindering speed.

    Purpose of the Study:

    • To propose a novel cross-period sub-Nyquist sampling method for LCSI.
    • To enhance measurement efficiency without compromising signal integrity.
    • To improve the accuracy and resolution of 3D surface profilometry.

    Main Methods:

    • Developed a cross-period sub-Nyquist sampling strategy.
    • Defined a specific sampling interval based on Nyquist step size and whole wavelength cycles.
    • Maintained both spatial and frequency information of the interferometry signals.

    Main Results:

    • Achieved a sampling interval 25 times larger than the Nyquist limit.
    • Enhanced measurement accuracy by over 90% compared to random sub-sampling.
    • Improved surface roughness measurement from 0.9259µm to 0.7003µm.

    Conclusions:

    • The proposed method significantly increases LCSI sampling intervals.
    • This technique preserves essential signal characteristics, spatial, and frequency information.
    • Cross-period sub-Nyquist sampling offers a more efficient and accurate approach to 3D surface profilometry.