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Published on: November 24, 2016
Nuclear reaction transmutation doping in GaN-HEMT MOSFETs
Rijin N T1, Dinesh Kumar1, M M Musthafa2
1Department of Physics, School of Sciences, Jain University, Bangalore 560069, India.
None:
Alpha-induced doping of GaN-High Electron Mobility Transistor (HEMT) was performed employing 45 MeV-α beam. The population of n-type and p-type dopants was identified and quantified by analysing the induced activities of the contributing nuclear reactions. The population was reproduced theoretically, using TALYS -1.96 nuclear reaction model, and the population of non-radioactive dopants was also estimated using the same model. The analysis shows a significant population of Ge and As isotopes, leading to intense n-type doping in the GaN-HEMT semiconductor.
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