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Measurement of electron beam induced sample heating in SEM experiments.

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Electron beam heating during Scanning Electron Microscopy (SEM) can affect samples. This study quantifies temperature increases up to 70°C, crucial for Electron Backscatter Diffraction (EBSD) analysis.

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • Scanning Electron Microscopy (SEM) offers high-resolution imaging and crystallographic analysis via Electron Backscatter Diffraction (EBSD).
  • High-energy electron beams in SEM can cause localized heating, potentially compromising specimen integrity during extended analyses.
  • Understanding and quantifying this electron-beam-induced heating is critical for accurate material characterization.

Purpose of the Study:

  • To investigate and quantify electron-beam-induced heating effects on a model metal sample (iron).
  • To determine the impact of various experimental parameters on localized sample temperature.
  • To validate experimental measurements with simulation data.

Main Methods:

  • Direct measurement of locally deposited electron beam energy using a MEMS-based heating device.
  • Validation through Monte Carlo (MC) and Finite Element Method (FEM) simulations.
  • Systematic variation of experimental parameters: acceleration voltage (5-30 kV), beam current (0.17-22 nA), dwell time (1µs-1 ms), and sample tilt (0°-70°).

Main Results:

  • Local sample temperatures were observed to increase by up to 70 °C during Electron Backscatter Diffraction (EBSD) experiments.
  • The primary experimental parameters influencing temperature increase are beam current and acceleration voltage.
  • Beam current demonstrated the most significant impact on localized heating.

Conclusions:

  • Electron beam heating is a significant factor in SEM/EBSD experiments, necessitating careful parameter selection.
  • Accurate quantification of heating effects is achievable through combined experimental and simulation approaches.
  • Optimizing experimental conditions based on these findings can preserve specimen integrity and improve data reliability.