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Updated: May 6, 2026

Fabrication, Operation and Flow Visualization in Surface-acoustic-wave-driven Acoustic-counterflow Microfluidics
Published on: August 27, 2013
Surface-Acoustic-Wave-Driven Acoustic Tweezing in a Silicon Microfluidic Chip.
This study introduces hybrid acoustic tweezers (ATs) for precise cell manipulation. These devices utilize bulk acoustic wave resonances to generate high acoustic pressures, enabling advanced cell testing and trapping.
Area of Science:
- Biophysics
- Microfluidics
- Acoustic Manipulation
Background:
- Surface-acoustic-wave (SAW)-driven acoustic tweezers (ATs) are valuable for high-resolution ultrasonic sample manipulation.
- Hybrid ATs, combining reusable SAW chips with disposable microfluidic (MF) chips, offer cost-effectiveness and reduced contamination.
- Efficient acoustic coupling is crucial for maximizing acoustic pressure within MF channels.
Purpose of the Study:
- To investigate the frequency-dependent characteristics of acoustophoresis in 50-MHz hybrid ATs.
- To elucidate the role of bulk acoustic wave (BAW) resonances in silicon substrates for acoustic standing wave (SW) formation.
- To demonstrate the application of these hybrid ATs for soft matter and biological sample analysis.
Main Methods:
- Fabrication of hybrid acoustic tweezers using a SAW chip and a silicon microfluidic chip.
- Investigation of acoustophoresis at 50 MHz, analyzing frequency-dependent characteristics.
- Characterization of acoustic pressure generation within the microfluidic channel.
Main Results:
- Bulk acoustic wave (BAW) resonances in the silicon substrate were found to facilitate acoustic standing wave (SW) formation.
- Acoustic pressures up to 2.1 ± 0.5 MPa were generated within the microfluidic channel.
- The hybrid ATs successfully probed transient viscoelastic deformation of HEK293T cells and trapped Tetrahymena cells.
Conclusions:
- Hybrid ATs utilizing BAW resonances in silicon substrates are effective for generating high acoustic pressures.
- The developed platform enables acousto-mechanical testing of soft matter and biological samples.
- These findings support the potential of hybrid ATs for advanced cell analysis and manipulation.
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