Integrated process-property modeling of YBa2Cu3O7 superconducting film for data and model driven process design

Tomoya Horide1, Shin Okumura2, Shunta Ito2

  • 1Department of Electrical Engineering, Nagoya University, Furo-cho, Chikusa, Nagoya, Japan. horide@nuee.nagoya-u.ac.jp.

PubMed