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Parylene-C Modified OSTE Molds for PDMS Microfluidic Chip Fabrication and Applications in Plasma Separation and
Muyang Zhang1,2, Haonan Li2, Xionghui Li2
1MOE Key Laboratory of Tumor Molecular Biology, Jinan University, Guangzhou 510632, China.
Biosensors
|June 25, 2025
Summary
A new microfabrication method uses Parylene-C to coat off-stoichiometry thiolene (OSTE) surfaces, enabling precise polydimethylsiloxane (PDMS) microstructures for plasma separation and crystal formation applications.
Area of Science:
- Materials Science
- Biomedical Engineering
- Microfabrication
Background:
- Thiol groups on OSTE surfaces interfere with PDMS curing.
- Existing microfabrication methods face challenges with specific polymer combinations.
Purpose of the Study:
- To develop a novel microfabrication process overcoming OSTE-PDMS curing interference.
- To demonstrate the application of the developed process in microfluidic devices.
Main Methods:
- Integration of Parylene-C coating to encapsulate thiol groups on OSTE surfaces.
- Fabrication of polydimethylsiloxane (PDMS) micropillar and microwell arrays.
- Application of fabricated devices for passive plasma separation and polymorphic crystal formation.
Main Results:
- Successful fabrication of PDMS micropillar and microwell arrays using the Parylene-C encapsulation method.
- Plasma separation chip achieved up to 57.5% efficiency across varying hematocrit levels.
- Microwell array chip demonstrated stable and controllable growth of salt and protein crystals.
Conclusions:
- The Parylene-C encapsulation technique provides a robust solution for microfabricating OSTE-PDMS microfluidic devices.
- The developed microfluidic chips show significant potential for applications in biomedical diagnostics and materials science.
- This novel approach advances microfluidic chip fabrication and its functional applications.

