Equalizing the In-Ear Acoustic Response of Piezoelectric MEMS Loudspeakers Through Inverse Transducer Modeling
Oliviero Massi1, Riccardo Giampiccolo1, Alberto Bernardini1
1Dipartimento di Elettronica, Informazione e Bioingegneria (DEIB), Politecnico di Milano, Piazza L. Da Vinci 32, 20133 Milano, Italy.
Micromachines
|June 27, 2025
Summary
This study introduces a digital signal equalization method to flatten the frequency response of Micro-Electro-Mechanical Systems (MEMS) loudspeakers. The technique effectively compensates for resonances, improving audio quality in miniature audio devices.
Area of Science:
- Acoustics
- Electrical Engineering
- Signal Processing
Background:
- Micro-Electro-Mechanical Systems (MEMS) loudspeakers are gaining traction for in-ear audio due to their miniature size.
- Pronounced resonances in MEMS loudspeaker frequency response limit their practical application.
- Conventional miniature transducers face limitations in modern audio devices.
Purpose of the Study:
- To develop a model-based digital signal equalization approach for MEMS loudspeakers.
- To mitigate the impact of mechanical and acoustic resonances on MEMS loudspeaker performance.
- To achieve a flat Sound Pressure Level (SPL) frequency response for improved audio fidelity.
Main Methods:
- A circuit equivalent model of the MEMS loudspeaker was utilized.
- An inverse circuital model was constructed using nullors.
- Discrete-time implementation was achieved using Wave Digital Filters (WDFs).
- The inverse system pre-processed the input voltage signal to compensate for transducer characteristics.
Main Results:
- The proposed digital equalization method significantly flattened the Sound Pressure Level (SPL) response.
- Compensation was effective across the 100 Hz-10 kHz frequency range.
- The maximum deviation from a target flat frequency response was less than 5 dB.
Conclusions:
- Model-based digital signal equalization effectively addresses resonance issues in MEMS loudspeakers.
- The Wave Digital Filter implementation provides a practical solution for real-time audio signal processing.
- This approach enhances the suitability of MEMS loudspeakers for high-fidelity miniature audio applications.


