All-Ceramic Fiber Fabry-Perot Cavity High-Temperature Pulsating Pressure Sensor Based on HTCC

In the aerospace, energy and nuclear energy sectors, dynamic pressure measurement of power equipment and pressure vessels in high-temperature environments is critical for validating design, manufacturing processes and operational condition monitoring. The existing electric sensors are resistant to temperature. It is difficult to meet the pressure measurement requirements of high temperature and high-frequency responses. In this paper, combining the material properties of high-temperature co-fired ceramics (HTCC) with the structural characteristics of Fabry-Perot, an all-ceramic fiber-optic Fabry-Perot high-temperature pulsating pressure sensor based on a HTCC pressure- sensing diaphragm and ceramic high-temperature sintering process, is proposed. Experimental results show that in the pressure range of 6 MPa, the static pressure sensitivity of the sensor is 1.30 nm/MPa, and the linear goodness of fit reaches 0.99913. The dynamic response frequency of the sensor reaches 598.5 kHz. The survival time at high temperature of 800 °C is more than 80 h. The sensitivity to temperature is 0.00475 nm/°C.