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Published on: June 30, 2019
Investigating contact resistance between WOx and metal electrodes in ECRAMs via interface analysis.
Juhee Kim1, Woochan Song1, Jeonghyeon Park1
1Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang, 37673, Republic of Korea.
Tungsten (W) shows the lowest contact resistance with tungsten oxide (WOx) in electrochemical random-access memories (ECRAMs). This research highlights W as the optimal contact material for high-performance neuromorphic computing devices.
Area of Science:
- Neuromorphic computing
- Materials science
- Solid-state electronics
Background:
- Resistive processing units are key in neuromorphic computing, overcoming von Neumann architecture limitations.
- Electrochemical random-access memories (ECRAMs) use ion movement for simultaneous data processing and memory storage.
- Contact resistance in WOx-based ECRAMs is a critical, yet understudied, factor for device performance.
Purpose of the Study:
- To investigate and quantify the contact resistance between WOx channels and various metal electrodes (W, Mo, Ni).
- To determine the electrical contact properties (Ohmic vs. Schottky) and interface characteristics.
- To identify the most suitable metal contact material for high-performance WOx-based ECRAMs.
Main Methods:
- Fabrication of transmission line model (TLM) devices with WOx channels and W, Mo, or Ni electrodes.
- Measurement and analysis of contact resistance and resistivity.
- Characterization of interfacial properties, including Schottky barrier height and metal oxidation layers.
Main Results:
- Tungsten (W) exhibited the lowest contact resistance with WOx, followed by Nickel (Ni) and Molybdenum (Mo).
- W and Mo formed Ohmic contacts, while Ni formed a Schottky contact with a barrier height of 118 meV.
- Mo formed a 9 nm metal oxidation layer at the WOx interface; W contact resistivity correlated with WOx channel resistivity.
Conclusions:
- Tungsten (W) is identified as the most suitable contact material for WOx-based ECRAMs due to its minimal contact resistance.
- Understanding contact properties is crucial for optimizing ECRAM performance in neuromorphic applications.
- The study provides essential data for designing next-generation resistive memory devices.
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