A high-precision 1 × 15 infrared temperature measurement linear array based on thermopile sensors

Area of Science:

• * Materials Science and Engineering
• * Electrical Engineering
• * Metrology

Background:

• * Precise temperature measurement is critical in semiconductor manufacturing and calibration.
• * Existing methods often face limitations in power consumption and accuracy.
• * Noncontact temperature sensing offers advantages for sensitive processes.

Purpose of the Study:

• * To develop a novel noncontact temperature measurement method with low power consumption and high precision.
• * To utilize a thermopile sensor-based linear array for surface temperature measurements.
• * To enhance accuracy and stability in temperature monitoring for semiconductor applications.

Main Methods:

• * A linear array of 15 thermopile sensors and an NTC thermistor.
• * An FPGA control board with a fiber optic interface and motion module.
• * Implementation of a multiparameter temperature compensation algorithm for sensor error correction.

Main Results:

• * Achieved a temperature measurement accuracy of 26 mK in the 293-303 K range.
• * Demonstrated maximum sensor repeatability error below 5.5 mK.
• * Exhibited non-uniformity error between sensors less than 11.9 mK.
• * Verified high stability over 6 hours of testing with accuracy reduction not exceeding 1.5 mK.

Conclusions:

• * The proposed thermopile sensor array provides a highly accurate and stable noncontact temperature measurement solution.
• * Low power consumption (<1.5 W) makes it suitable for energy-sensitive semiconductor applications.
• * The multiparameter compensation algorithm effectively addresses sensor inconsistencies, outperforming traditional calibration methods.