A high-precision 1 × 15 infrared temperature measurement linear array based on thermopile sensors

In applications such as those in the semiconductor industry, precise temperature measurements with low power consumption are crucial. This article presents a novel noncontact temperature measurement method with low power consumption and high precision, and a thermopile sensor-based linear array for surface temperature measurements is used in semiconductor manufacturing and temperature calibration applications. The array consists of 15 thermopile sensors, a negative temperature coefficient (NTC) thermistor, an FPGA control board with a fiber optic interface, and a motion module. Moreover, the total power consumption of the board is less than 1.5 W. On the FPGA control board, a multiparameter temperature compensation algorithm is used to address intrinsic temperature differences and consistency errors among the sensors. Compared with the traditional two-point calibration method, the temperature measurement accuracy of the proposed method reaches 26 mK in the temperature range of 293-303 K, the maximum repeatability error of the sensor is less than 5.5 mK, and the non-uniformity error between 15 sensors is less than 11.9 mK. The array and its replicas were subjected to more than 6 h of rigorous testing, demonstrating their high stability, with the reduction in accuracy not exceeding 1.5 mK.