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Updated: Sep 16, 2025

High-Throughput Total Internal Reflection Fluorescence and Direct Stochastic Optical Reconstruction Microscopy Using a Photonic Chip
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Research on Total Internal Reflection Detection Technology for Subsurface Defects of Optical Elements Based on

Rongcai Bao1, Kaige Qu1, Lu Wu1

  • 1College of Engineers, Robotics and Intelligent Manufacturing Engineering, Zhejiang University, Hangzhou 310000, China.

Sensors (Basel, Switzerland)
|July 12, 2025
PubMed
Summary

This study introduces a new spectral confocal scattering measurement method for detecting subsurface defects in optical elements. The technique achieves high-precision, non-destructive detection with an axial resolution of 0.8 μm.

Keywords:
nondestructive testingspectral confocalsubsurface defecttotal internal reflection

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Area of Science:

  • Optics and Photonics
  • Materials Science
  • Metrology

Background:

  • Subsurface defects in precision optical elements degrade performance by enhancing light fields, increasing laser absorption, and reducing mechanical properties.
  • High-precision quantitative automatic detection of these defects is crucial for optical element manufacturing.
  • Existing methods may have limitations in resolution, depth, or require fluorescent substances.

Purpose of the Study:

  • To develop and validate a novel, non-destructive method for high-precision detection of subsurface defects in optical elements.
  • To achieve accurate depth and location measurements of internal defects.
  • To overcome limitations of current defect detection techniques.

Main Methods:

  • A spectral confocal scattering measurement system was designed, incorporating a dispersive lens group (480-670 nm).
  • The system integrates spectral confocal technology with total internal reflection to minimize surface scattered light interference.
  • The method operates without the need for fluorescent substances, enabling non-destructive evaluation.

Main Results:

  • The developed method achieved an axial resolution of 0.8 μm.
  • A measuring depth range of 0.94 mm was demonstrated.
  • Experimental verification confirmed accurate measurement of subsurface defect depth and location.

Conclusions:

  • The spectral confocal scattering measurement method is feasible and effective for high-precision, non-destructive detection of subsurface defects.
  • This technique offers a significant advancement in quality control for precision optical element manufacturing.
  • The method provides reliable quantitative data on defect characteristics crucial for performance assessment.