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Updated: Sep 15, 2025

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices
Published on: January 27, 2017
Cascade upconversion: a strategy enabling four-photon lithography in weak light intensity
Shishuo Li1, Kai Li1, Chenqi Yi2
1Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, China.
Abstract:
Multiphoton lithography offers the minimum feature size available in submicron scale true 3D printing, but excessive femtosecond laser intensity prevents it from leading to higher photon counts. To circumvent away this effect, we present a cascade upconversion strategy, which is a combination of two efficient two-photon upconversion processes to achieve four-photon photopolymerization. In order to demonstrate the advantages and feasibility of this approach, we combine excited state absorption upconversion using high concentration Ho3+/Yb3+ doped upconversion nanoparticles with triplet-triplet annihilation upconversion to fabricate 3D polymer structures by low-cost continuous wave 980 nm laser at 105 W/cm2. This method overcomes the diffusivity caused by isotropy of nanoparticles luminescence, and achieves two orders of magnitude reduction in feature size while maintaining the advantages of true 3D printing (fast, freedom, high quality) and using near infrared light. This new strategy provides a general way for designing four-photon and even six-photon multiphoton lithography in weak light intensity.
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