A stick-slip piezo-driven two-degree-of-freedom motion stage without backward motion

This study proposes a two-degree-of-freedom stick-slip piezo-driven motion stage without backward motion. The stage combines a flexible beam structure with the stick-slip effect to achieve high positioning accuracy and structural simplicity. Open-loop experiments verified the role of the flexible beam in suppressing backward motion. Displacement, speed, and load capacity were evaluated sequentially. In closed-loop control, a fractional-order proportional integral differential algorithm was introduced for the first time to design the control strategy, and its effectiveness was confirmed experimentally. The results demonstrate that the stage achieves stable micrometer-level motion and effectively avoids the backward motion commonly seen in traditional stick-slip actuators. This work provides a novel approach for applying piezo-driven technology in precision motion control systems.