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Confocal microscopy is an advanced microscopic technique. The prime advantage of the confocal microscope over other microscopy techniques is its ability to block the out-of-focus light from the illuminated samples using pinholes. It is widely used with fluorescence optics to obtain high-resolution, sharp contrast images. Unlike optical microscopes, confocal microscopes use a focused beam of light laser to scan the entire sample surface at different z-planes. These microscopes are, therefore,...
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Reducing tilt errors in chromatic confocal measurement: a peak extraction algorithm based on the pseudo-Voigt

Fengshuang Liang, Jiafu Li, Mingyang Wu

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    This summary is machine-generated.

    A new method accurately measures inclined surfaces using chromatic confocal measurement (CCM) by compensating for asymmetric spectral confocal signals (SCS). This improves accuracy for complex surface profiling.

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    Area of Science:

    • Optical metrology
    • Surface characterization
    • Signal processing

    Background:

    • Chromatic confocal measurement (CCM) converts spectral signals to position data.
    • Inclined surfaces distort CCM signals, causing asymmetry and measurement errors.
    • Existing peak extraction methods fail on asymmetric signals, reducing accuracy.

    Purpose of the Study:

    • To develop a robust method for accurate peak extraction from asymmetric spectral confocal signals (SCS) in CCM.
    • To analyze the impact of inclination angles on CCM signal distortion and measurement error.
    • To enhance the reliability of CCM for complex and inclined surface measurements.

    Main Methods:

    • Developed an optical transfer model for CCM considering tilt angles.
    • Proposed an asymmetric signal error compensation method using a modified pseudo-Voigt function.
    • Integrated damping perturbation, asymmetric parameters, and an exponential term for curve fitting.

    Main Results:

    • The proposed method accurately fits asymmetric SCS and extracts peak wavelengths.
    • Demonstrated superior goodness-of-fit (R² and RMSE) compared to traditional methods.
    • Achieved minimal error dependence on inclination angles, stabilizing below 60 nm at 10°.

    Conclusions:

    • The novel compensation method significantly improves CCM accuracy and robustness for inclined surfaces.
    • Outperforms Gaussian fitting by 77.8% at 10° inclination, reducing positional error.
    • Offers a viable solution for high-precision measurements in complex surface applications.