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Atomic Force Microscopy

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Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
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  11. Arbitrary Thickness Profile Metrology Of Low-z And Monolithic Material Components With A Single X-ray Projection.
  1. Home
  3. Research Domains
  5. Engineering
  7. Materials Engineering
  9. Wearable Materials
  11. Arbitrary Thickness Profile Metrology Of Low-z And Monolithic Material Components With A Single X-ray Projection.

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Arbitrary thickness profile metrology of low-Z and monolithic material components with a single X-ray projection.

Wenjie Hao1, Feixiang Wang2, Fucheng Yu2

  • 1Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, People's Republic of China.

Journal of Synchrotron Radiation
|July 31, 2025

View abstract on PubMed

Summary
This summary is machine-generated.

X-ray phase contrast imaging enables precise, non-destructive thickness metrology for low-Z materials. This advanced technique overcomes limitations of X-ray micro-computed tomography (micro-CT) for efficient, high-resolution 3D measurements.

Keywords:
X-ray phase contrast imagingmetrology of microlens arraysingle projection measurementthickness metrology

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Area of Science:

  • Materials Science
  • Metrology
  • Optics

Background:

  • Precise thickness measurement is critical for low-Z materials used in heat conduction, implants, microfluidics, and optics.
  • X-ray micro-computed tomography (micro-CT) offers non-destructive 3D imaging but is slow and struggles with laminar samples.

Purpose of the Study:

  • To develop a faster, more versatile method for thickness metrology of low-Z materials with arbitrary profiles.
  • To overcome the limitations of micro-CT for efficient and dynamic thickness measurements.

Main Methods:

  • Utilized X-ray phase contrast imaging to retrieve X-ray phase shifts from a single projection.
  • Developed an open device design for in situ, non-contact, high-precision measurements.

Main Results:

  • Achieved a mean absolute error of 0.68 µm for cylindrical fibers within a 1.33 mm field of view.
  • Demonstrated efficient measurement and damage assessment on worn fibers and microlens arrays.
  • Obtained 3D profiles from a single projection for detailed error analysis.

Conclusions:

  • X-ray phase contrast imaging provides a high-precision, efficient, and versatile alternative to micro-CT for thickness metrology.
  • The method's capabilities include in situ, non-contact, large field of view, and penetrative measurements.
  • Potential applications include dynamic thickness measurements and real-time monitoring in loading devices.