NEMS acceleration transducers based on MoS₂/graphene heterostructure ribbons with an attached proof mass: a...

Compared with silicon-based accelerometers, nanoelectromechanical system accelerometers based on two-dimensional materials have potential advantages such as ultra-small sizes and high sensitivity. However, transition metal dichalcogenide based NEMS accelerometers, such as molybdenum disulfide (MoS₂) based accelerometers, have not been studied yet. Here, we modeled different acceleration transducers based on MoS₂/graphene heterostructure ribbons, double-layer MoS₂ ribbons and double-layer graphene ribbons with an attached SiO₂/Si proof mass and simulated their mechanical properties in triaxial directions. Using the finite element analysis method, Young's moduli of these 2D membranes were estimated. Furthermore, the impacts of geometrical sizes of acceleration transducers, built-in stresses in suspended 2D ribbons, and applied forces on the deflections and strains of suspended 2D ribbons, as well as first- to sixth-order resonant frequencies of acceleration transducers, were studied. This work would lay a solid foundation for the design, fabrication, and application of next-generation high-performance NEMS accelerometers based on 2D membranes.