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There are two main infrared (IR) spectrophotometers: dispersive IR spectrometers and Fourier transform infrared (FTIR) spectrometers. In a dispersive IR spectrometer, a beam of infrared radiation produced by a hot wire is divided into two parallel equal-intensity beams using mirrors. One beam passes through the sample, while another is a reference beam. The beams then move through the monochromator, which separates the radiations into a continuous spectrum of different frequencies. The...
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Calibration of interferometer instrument transfer function using reconfigurable sinusoidal phase via spatial light

Antong Huang, Shuai Xue, Yunfeng Mao

    Optics Letters
    |August 2, 2025
    PubMed
    Summary
    This summary is machine-generated.

    A new reconfigurable sinusoidal phase (RSP) method uses a spatial light modulator (SLM) for instrument transfer function (ITF) calibration. This approach avoids complex fabrication, offering a promising solution for high-accuracy interferometer calibration.

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    Area of Science:

    • Optical metrology
    • Interferometry calibration

    Background:

    • Extreme surface form measurement accuracy is critical for X-ray and EUV optics.
    • Existing instrument transfer function (ITF) calibration methods lack standardization and require difficult fabrication of specialized structures.

    Purpose of the Study:

    • To propose and validate a novel, flexible method for instrument transfer function (ITF) calibration.
    • To overcome the limitations of current ITF calibration techniques, particularly the need for high-accuracy fabricated structures.

    Main Methods:

    • Development of a reconfigurable sinusoidal phase (RSP) method utilizing a high-resolution spatial light modulator (SLM).
    • Generation of variable sinusoidal phases with different spatial frequencies and amplitudes.
    • Compensation of inherent wavefront distortion to single-nanometer PV and sub-nanometer RMS.

    Main Results:

    • The RSP method successfully compensates for wavefront distortion, eliminating the need for high-accuracy flat plates.
    • Demonstrated repeatability and fidelity of the RSP ITF calibration results.
    • The method aligns with the ISO definition of ITF.

    Conclusions:

    • The reconfigurable sinusoidal phase (RSP) method is a viable and promising approach for instrument transfer function (ITF) calibration.
    • This technique simplifies calibration and enables investigation into optimal ITF calibration structure designs for specific instruments.