You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: Sep 11, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
A novel silicon-based micro-electro-mechanical systems sensor membrane was designed and simulated. Experimental results demonstrated a high sensitivity of -170 dB, indicating its potential for various sensing applications.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: