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SOI optical waveguide-based refractive index sensor using a multi-slot subwavelength grating Mach-Zehnder

YiFei Guo, BoXia Yan, Yan Qi

    Applied Optics
    |August 12, 2025
    PubMed
    Summary

    This study presents a compact, high-sensitivity refractive index sensor using a novel multi-slot subwavelength grating waveguide. Fabricated on silicon-on-insulator, it offers a scalable solution for integrated optical sensing applications.

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    Area of Science:

    • Photonics
    • Integrated Optics
    • Nanophotonics

    Background:

    • Refractive index sensors are crucial for various applications, including chemical and biological detection.
    • Existing sensors often face limitations in sensitivity, size, or fabrication cost.
    • Silicon-on-insulator (SOI) platforms offer a robust foundation for integrated photonic devices.

    Purpose of the Study:

    • To design and fabricate a compact and highly sensitive Mach-Zehnder interferometer (MZI) based refractive index sensor.
    • To leverage advanced waveguide structures for enhanced sensing performance.
    • To ensure compatibility with standard CMOS fabrication for scalability and cost-effectiveness.

    Main Methods:

    • Design of a Mach-Zehnder interferometer on a standard 0.18 µm SOI process.
    • Incorporation of a multi-slot subwavelength grating (MSGG) waveguide in the sensing arm.
    • Characterization of the sensor's sensitivity and performance.

    Main Results:

    • Achieved a high experimental sensitivity of 462.4 nm/RIU (refractive index unit).
    • Demonstrated high performance with a short sensing length of 100 µm.
    • Validated the synergistic effect of slot waveguides and subwavelength gratings for enhanced optical confinement and dispersion engineering.

    Conclusions:

    • The developed MSGG waveguide MZI sensor offers a promising, compact, and sensitive solution for refractive index sensing.
    • The sensor's compatibility with standard CMOS fabrication makes it a scalable and cost-effective option for integrated optical sensing.
    • This technology has broad potential for diverse applications requiring precise refractive index monitoring.