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Updated: Sep 11, 2025

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Vortex beam-Fizeau interferometer using the rotational four-step phase-shifting method.

Daju Lu, Dayong Zhang, Zhongming Yang

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    |August 12, 2025
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    Summary
    This summary is machine-generated.

    We developed a novel vortex beam-Fizeau interferometer for precise optical surface measurements. This new method achieves high accuracy, offering a reliable technique for optical metrology applications.

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    Area of Science:

    • Optics and Metrology
    • Interferometry
    • Optical Engineering

    Background:

    • Vortex beam interferometers are crucial for optical metrology.
    • Common-path Fizeau vortex interferometers offer advantages for high-precision optical surface profile measurement.
    • Previous reports on Fizeau vortex interferometers are limited.

    Purpose of the Study:

    • To propose and demonstrate a vortex beam-Fizeau interferometer.
    • To achieve high-precision optical surface profile measurement.
    • To validate the performance against commercial Fizeau interferometers.

    Main Methods:

    • Development of a vortex beam-Fizeau interferometer.
    • Implementation of a rotational four-step phase-shifting method.
    • Introduction of angular phase shifts via object rotation.

    Main Results:

    • Achieved high-precision optical profile measurement.
    • Measurement profile deviations of 1.5164λ (PV) and 0.0933λ (RMS).
    • Root mean square error of measurement profile deviation was less than 9.33%.

    Conclusions:

    • The proposed vortex beam-Fizeau interferometer provides a reliable scheme for optical surface measurement.
    • The rotational four-step phase-shifting method enhances measurement accuracy.
    • This work advances the application of vortex beam interferometers in optical metrology.