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Zonal wavefront reconstruction with multidirectional difference wavefronts for multilateral shearing interferometers.

Hui Zhong, Yanqiu Li, Ke Liu

|August 12, 2025

Summary

This study introduces a new zonal wavefront reconstruction method using multidirectional differences for improved accuracy in lateral shearing interferometry. The enhanced technique boosts measurement precision and noise immunity for optical system analysis.

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Area of Science:

Optical Engineering
Metrology
Interferometry

Background:

Wavefront reconstruction is critical for accurate measurements in shearing interferometers.
Conventional zonal methods using only orthogonal wavefronts limit precision.

Purpose of the Study:

To develop an innovative zonal wavefront reconstruction method using multidirectional differences.
To enhance measurement accuracy and noise immunity in lateral shearing interferometry.

Main Methods:

Proposed a zonal reconstruction method incorporating vertical, horizontal, diagonal, and anti-diagonal difference wavefronts.
Constructed a multidirectional reconstruction equation utilizing specific grid points.
Validated through simulations and experimental platforms for null and dynamic response tests.

Main Results:

Achieved higher reconstruction accuracy across various shear ratios with improved noise immunity.
Enhanced absolute measurement precision in quadriwave lateral shearing interferometry from 0.0065λ to 0.0048λ RMSE.
Demonstrated superior linear response and detection accuracy in aberration measurement.

Conclusions:

The multidirectional zonal wavefront reconstruction method significantly improves precision and robustness.
The technique is practical and effective for surface detection and aberration analysis in optical systems.