μg-level bias stability of a tri-axial grating Talbot-effect-based MOEMS accelerometer

Area of Science:

• MEMS/NEMS
• Optical Engineering
• Sensor Technology

Background:

• Micro-opto-electro-mechanical system (MOEMS) accelerometers offer high precision and anti-electromagnetic interference capabilities.
• Cross-axis interference is a major limitation affecting accelerometer accuracy in critical applications.
• Existing MOEMS accelerometers require improvements in bias stability and reduction of interference.

Purpose of the Study:

• To develop a three-axis integrated grating MOEMS accelerometer with reduced cross-axis interference.
• To enhance bias stability for more accurate acceleration measurements.
• To present a novel design for improved performance in inertial navigation and automotive systems.

Main Methods:

• Designed out-of-plane and in-plane accelerometers utilizing a symmetrical cantilever beam structure.
• Integrated a three-axis grating MOEMS accelerometer.
• Minimized cross-axis interference through symmetrical design principles.

Main Results:

• Achieved bias stabilities of 1.14 µg (X-axis), 2.4 µg (Y-axis), and 1.79 µg (Z-axis).
• Obtained sensitivities of 7.12 V/g (X-axis), 7.04 V/g (Y-axis), and 26.31 V/g (Z-axis).
• Reduced out-of-plane cross-axis interference from 5.02% to 0.14%, an order of magnitude improvement.

Conclusions:

• The proposed three-axis integrated grating MOEMS accelerometer demonstrates significantly lower cross-axis interference.
• The symmetrical cantilever beam design enhances bias stability and measurement accuracy.
• This advancement offers superior performance for demanding applications in inertial navigation and automotive industries.