MEMS-based beam steering system with metalens and cone lens

A micro-electro-mechanical system (MEMS)-based LiDAR beam steering system composed of a cone lens and a metalens is proposed. The cone lens has three key optical surfaces, through which the incoming beam passes and then outputs along the horizontal direction. When the MEMS rotates around the Y axis, the output beam can scan across a 360° field of view in the horizontal direction. Additionally, the output beam can also scan in a vertical field of view (FoV) of 12.3°. The metalens can further reduce the divergence of the output beam in both horizontal and vertical directions. The output beam has a narrow divergence with a divergence angle of 0.313^∘×0.287^∘. The system provides a design solution for a solid-state LiDAR beam steering system that meets the design requirements of a large FoV with a more miniaturized structure while being easier to integrate and assemble.