Ambiguity solving of dynamic spectroscopic ellipsometry by using a wedge-window monolithic polarizing interferometric...

This paper describes a dynamic spectroscopic ellipsometer that can extract accurate Ψ(λ) and Δ(λ) dynamically without ambiguity problems. We address how quadratic equations cause ambiguity in extracting Ψ(k) and how the ambiguity problem is solved by employing a wedge-window monolithic polarizing interferometric (W-MPI) device. To prove the benefit of the proposed W-MPI scheme, some experiments are conducted using four thin-film samples with a wide range of thicknesses. In this study, we demonstrate the dynamic measurement capability of both Ψ(λ) and Δ(λ) by a video clip to emphasize the potential of the proposed scheme.