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    This study introduces multi-channel information fusion structured illumination microscopy (MF-SIM) for improved 3D measurements. MF-SIM enhances accuracy and stability by fusing color CCD data, outperforming traditional methods.

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    Area of Science:

    • Microscopy
    • Optical Imaging
    • Metrology

    Background:

    • Traditional structured illumination microscopy (SIM) faces limitations in accuracy and stability for micro-nano 3D measurements.
    • Single-channel SIM systems are vulnerable to noise interference, especially at modulation peaks with small gradients.

    Purpose of the Study:

    • To develop and validate a novel multi-channel information fusion structured illumination microscopy (MF-SIM) method.
    • To enhance the accuracy and stability of 3D morphological measurements at the micro-nano scale.

    Main Methods:

    • Utilized a color CCD to capture multi-channel images.
    • Leveraged wavelength-specific focal plane characteristics for modulation information extraction.
    • Implemented multi-channel data fusion to mitigate noise and improve signal quality.

    Main Results:

    • MF-SIM effectively extracts abundant modulation information from single frames.
    • The fusion of multi-channel data significantly reduces noise interference compared to single-channel methods.
    • Numerical simulations and experimental results confirmed MF-SIM's superior performance.

    Conclusions:

    • The MF-SIM method offers significant advantages in measurement accuracy and repeatability over traditional monochrome CCD-based SIM.
    • MF-SIM provides a more robust and reliable approach for high-precision 3D morphological measurements.